Title :
Reconstruction of the form of a surface of hybrid photoreception modules
Author :
Nastovjak, Artem E.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
For the control of the shape of a surface hybrid photoreception modules (Focal Plane Arrays - FPA) it is offered to use an interference of reflected light between a basic plane and FPA. The algorithm of reconstruction of the shape of a surface is offered and realized. The method can be used for a quality monitoring assembly and definition of parameters of a jointing layer. Results of processing of experimental data for FPA on basis InAs and Si are resulted.
Keywords :
III-V semiconductors; elemental semiconductors; focal planes; hybrid integrated circuits; indium compounds; infrared detectors; modules; narrow band gap semiconductors; photodetectors; silicon; surface reconstruction; Al2O3; FPA; InAs; Si; focal plane arrays; infrared detectors; narrow band gap semiconductors; quality monitoring assembly; surface hybrid photoreception modules; surface reconstruction; Hybrid integrated circuits; Indium compounds; Infrared detectors; Photodetectors; Silicon;
Conference_Titel :
Electron Devices and Materials, 2004. Proceedings. 5th Annual. 2004 International Siberian Workshop on
Print_ISBN :
5-7782-0463-9
DOI :
10.1109/PESC.2004.241051
