Title :
High sensitivity magnetic near field probe based on ferromagnetic thin-film technology
Author :
Yamaguchi, Masahiro ; Kikuchi, Hiroaki ; Sugimoto, Satoshi ; Arai, Ken-Ichi ; Iwanami, Mizuki ; Nakamura, Atsushi ; Hoshino, Shigeki
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
The high frequency carrier type thin-film magnetic field sensor was applied to detect magnetic field over the microstrip line on a PCB. The 100 μm long, 5 μm wide and 1 μm thick CoNbZr thin-film probe could distinguish a meander line with a line pitch of 200 μm. Maximum possible signal frequency range was estimated as over 1 GHz
Keywords :
cobalt alloys; ferromagnetic materials; magnetic sensors; magnetic thin film devices; microstrip lines; niobium alloys; printed circuit testing; probes; zirconium alloys; 1 micron; 100 micron; 200 micron; 5 micron; CoNbZr; PCB; ferromagnetic thin-film technology; high frequency carrier type sensor; magnetic field sensor; magnetic near field probe; meander line; microstrip line; signal frequency range; spatial resolution; Consumer electronics; Current density; Frequency; Magnetic field measurement; Magnetic films; Magnetic sensors; Permeability; Probes; Spatial resolution; Thin film sensors;
Conference_Titel :
Electrical Performance of Electronic Packaging, 2001
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-7024-4
DOI :
10.1109/EPEP.2001.967673
