Title :
Requirements for Device and Process Modeling of Submicron Devices
Author :
Polak, S.J. ; Goossens, R.J.G. ; Cowern, N.E.B.
Author_Institution :
Nederlandse Philips Bedrijven B.V., CFT Automation-CPS, Building SAQ-2, P.O. Box 218, 5600 MD Eindhoven, The Netherlands
Abstract :
In this paper the requirements for device and process modelling for submicron devices are discussed. Some examples are presented to illustrate the origins of these requirements. A framework for continuum-physics simulations is used to further outline the necessary facilities. Throughout the paper problems are considered from a numerical as well as a device-engineer´s point of view.
Keywords :
Analytical models; Computer industry; Electronics industry; Industrial control; Integrated circuit modeling; Laboratories; Physics; Predictive models; Solid modeling; Tin;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
