Fuzzy-Logic Reliability Predictions in Microtechnologies

Author

Bazu, Marius ; Tibeica, Catalin ; Galateanu, Lucian ; Ilian, Virigl Emil

Author_Institution

Nat. Inst. for Microtechnol., IMT Bucharest

Volume

1

fYear

2005

fDate

28-30 Nov. 2005

Firstpage

89

Lastpage

93

Abstract

A method for reliability prediction, called SYRP (synergetic reliability prediction), is presented, based on a combined fuzzy-logic & physics-of-failure approach. SYRP is used for a semiconductor device (thermal sensors) and the estimations, compared with experimental results, prove to be accurate enough. Also, the problems to be solved for using this method for MEMS are presented. The specific case of a MEMS Fabry-Perot interferometer is analyzed and the failure rate estimations are discussed. The method seems to be particularly useful for the reliability analysis made by virtual prototyping

Keywords

fuzzy logic; micromechanical devices; reliability; semiconductor device manufacture; virtual prototyping; MEMS Fabry-Perot interferometer; SYRP; failure rate estimation; fuzzy-logic reliability prediction; microtechnology; semiconductor device; synergetic reliability prediction; virtual prototyping; Failure analysis; Fuzzy logic; Integrated circuit reliability; Manufacturing processes; Materials reliability; Micromechanical devices; Physics; Semiconductor devices; Thermal sensors; Virtual prototyping;

fLanguage

English

Publisher

ieee

Conference_Titel

Computational Intelligence for Modelling, Control and Automation, 2005 and International Conference on Intelligent Agents, Web Technologies and Internet Commerce, International Conference on

Conference_Location

Vienna

Print_ISBN

0-7695-2504-0

Type

conf

DOI

10.1109/CIMCA.2005.1631247

Filename

1631247