DocumentCode
1941085
Title
Table of contents
fYear
2012
fDate
19-22 March 2012
Firstpage
1
Lastpage
6
Abstract
The following topics are dealt with: design margin; ring oscillator; variability analysis; MEMS; process characterization; RF; parameter extraction; bonding stress; MOSFET matching and capacitance.
Keywords
MOSFET; capacitance; micromechanical devices; oscillators; radiofrequency integrated circuits; stress analysis; MEMS; MOSFET; MOSFET matching; RF; bonding stress; capacitance; design margin; parameter extraction; process characterization; ring oscillator; variability analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
1071-9032
Print_ISBN
978-1-4673-1027-7
Type
conf
DOI
10.1109/ICMTS.2012.6190599
Filename
6190599
Link To Document