Title :
32nm yield learning using addressable defect arrays
Author :
Karthikeyan, Muthu ; Cassels, John ; Arie, Lior
Author_Institution :
IBM Syst. & Technol. Group, Hopewell Junction, NY, USA
Abstract :
The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology.
Keywords :
calibration; integrated circuit design; integrated circuit yield; resistors; area efficiency; calibration; defect localization capability; opens monitor; read-only addressable defect array; reference resistor; robust periphery design; shorts monitor; size 32 nm; technology development; top yield detractor; yield learning; Arrays; Clocks; Force; Latches; Testing;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4673-1027-7
DOI :
10.1109/ICMTS.2012.6190620
