DocumentCode
1941566
Title
32nm yield learning using addressable defect arrays
Author
Karthikeyan, Muthu ; Cassels, John ; Arie, Lior
Author_Institution
IBM Syst. & Technol. Group, Hopewell Junction, NY, USA
fYear
2012
fDate
19-22 March 2012
Firstpage
122
Lastpage
128
Abstract
The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology.
Keywords
calibration; integrated circuit design; integrated circuit yield; resistors; area efficiency; calibration; defect localization capability; opens monitor; read-only addressable defect array; reference resistor; robust periphery design; shorts monitor; size 32 nm; technology development; top yield detractor; yield learning; Arrays; Clocks; Force; Latches; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location
San Diego, CA
ISSN
1071-9032
Print_ISBN
978-1-4673-1027-7
Type
conf
DOI
10.1109/ICMTS.2012.6190620
Filename
6190620
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