Title :
The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Author :
Cassard, Janet ; Geist, Jon ; Gaitan, Michael ; Seiler, David G.
Abstract :
The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby validating their use of the documentary standard test methods. Examples of NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Keywords :
micromechanical devices; standards; MEMS; NIST measurements; National Institute of Standards and Technology; RM 8096; RM 8097; microelectromechanical systems; Micromechanical devices; Microscopy; Semiconductor device measurement; Strain; Stress; Thickness measurement;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4673-1027-7
DOI :
10.1109/ICMTS.2012.6190649
