DocumentCode :
1942251
Title :
A novel approach to integrating three dimensional carbon nanostructures with electronic circuitry
Author :
Fletcher, B.L. ; Anatoli, M.V. ; Timothy, M.E. ; Milton, E.N.
Author_Institution :
Oak Ridge Nat. Lab., Knoxville, TN
fYear :
2006
fDate :
15-18 Jan. 2006
Firstpage :
100
Lastpage :
100
Abstract :
Summary form only given. The controlled synthesis of three dimensional carbon nanostructures, such as nanotubes and nanofibers, has been extensively studied and described. The process typically involves a chemical vapor deposition at high temperatures to catalyze three dimensional growth. The harsh growth conditions are a limiting factor for applications that require the synthesis of carbon nanostructures on existing electronic circuitry. We report on a novel method for integrating three dimensional carbon nanostructures, produced in high temperature processes, with CMOS circuitry
Keywords :
CMOS integrated circuits; carbon fibres; carbon nanotubes; chemical vapour deposition; high-temperature effects; nanoelectronics; C; CMOS circuitry; chemical vapor deposition; electronic circuitry; high-temperature processes; nanofibers; nanotubes; three-dimensional carbon nanostructure synthesis; three-dimensional growth; CMOS process; Chemical vapor deposition; Circuit synthesis; Laboratories; Nanostructures; Nanotubes; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Bio Micro and Nanosystems Conference, 2006. BMN '06
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0056-2
Electronic_ISBN :
1-4244-0057-0
Type :
conf
DOI :
10.1109/BMN.2006.330908
Filename :
4129438
Link To Document :
بازگشت