Title :
Ultrathin Soi Formation by Carbon Implantation and Layer Transferring
Author :
Tong, O.-Y. ; You, H.M. ; Cha, G. ; Gösele, U.
Author_Institution :
School of Engineering, Duke University, Durham, NC
Keywords :
Annealing; Chemical processes; Etching; Implants; Machining; Silicon; Temperature; Thermal degradation; Very large scale integration; Wafer bonding;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664771
