DocumentCode

1943387

Title

Ultrathin Soi Formation by Carbon Implantation and Layer Transferring

Author

Tong, O.-Y. ; You, H.M. ; Cha, G. ; Gösele, U.

Author_Institution

School of Engineering, Duke University, Durham, NC

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

10

Lastpage

11

Keywords

Annealing; Chemical processes; Etching; Implants; Machining; Silicon; Temperature; Thermal degradation; Very large scale integration; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664771

Filename

664771