Title :
Determination of Excess Carrier Lifetimes in Silicon-On-Insulator Wafers by a Contactless Optical Technique
Author :
Yang, P.C. ; Li, Sheng S.
Author_Institution :
Department of Electrical Engineering, University of Florida
Keywords :
Charge carrier lifetime; Contacts; Laser beams; Laser excitation; Optical films; Optical filters; Semiconductor films; Silicon on insulator technology; Substrates; Tellurium;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664773
