Title :
Effects of Ionic Doping on the Behaviors of Oxygen Vacancies in HfO2 and ZrO2: A First Principles Study
Author :
Zhang, Haowei ; Gao, Bin ; Yu, Shimeng ; Lai, Lin ; Zeng, Lang ; Sun, Bing ; Liu, Lifeng ; Liu, Xiaoyan ; Lu, Jing ; Han, Ruqi ; Kang, Jinfeng
Author_Institution :
Key Lab. of Microelectron. Devices & Circuits, Peking Univ., Beijing, China
Abstract :
The effects of metallic ion (Al, Ti, or La) doping in HfO2 or ZrO2 on the behaviors of oxygen vacancies (V0) such as the formation energy, density of states, and migration energy were investigated by using first principles calculations. The calculations show that, 1) the doping causes an upward shift of deep V0 levels; 2) dopant radius has a weak impact on the relaxed formation energy of V0 (Ej v) but a significant impact on the unrelaxed Ef v; 3) the relaxed formation energy Ef v of V0 is remarkably reduced by trivalent ion (Al or La) doping compared to by tetravalent ion (Ti) doping; 4) Al, Ti, or La doping impacts the migration barriers of V0 along different directions.
Keywords :
ab initio calculations; aluminium; doping; electronic density of states; hafnium compounds; lanthanum; titanium; vacancies (crystal); zirconium compounds; HfO2:Al; HfO2:La; HfO2:Ti; ZrO2:Al; ZrO2:La; ZrO2:Ti; density of states; first principles calculation; formation energy; ionic doping effects; migration energy; oxygen vacancies; Doping; Hafnium oxide; High K dielectric materials; High-K gate dielectrics; Laboratories; Microelectronics; Neural networks; Oxygen; Physics; Zirconium;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-3974-8
Electronic_ISBN :
1946-1569
DOI :
10.1109/SISPAD.2009.5290225