DocumentCode :
1944562
Title :
Electrolytic Analysis of Oxide Leakage in Simox Material
Author :
Allen, L.P. ; Genis, A. ; Dolan, R. ; Krull, W.
Author_Institution :
Ibis Technology Corporation, MA
fYear :
1992
fDate :
6-8 Oct. 1992
Firstpage :
22
Lastpage :
23
Keywords :
Capacitors; Conference proceedings; Copper; Density measurement; Feedback; Implants; Leak detection; Leakage current; Particle measurements; Particle tracking;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
ISSN :
1078-621X
Print_ISBN :
0-7803-7439-8
Type :
conf
DOI :
10.1109/SOI.1992.664776
Filename :
664776
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1944562
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