DocumentCode

1944562

Title

Electrolytic Analysis of Oxide Leakage in Simox Material

Author

Allen, L.P. ; Genis, A. ; Dolan, R. ; Krull, W.

Author_Institution

Ibis Technology Corporation, MA

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

22

Lastpage

23

Keywords

Capacitors; Conference proceedings; Copper; Density measurement; Feedback; Implants; Leak detection; Leakage current; Particle measurements; Particle tracking;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664776

Filename

664776