• DocumentCode
    1944826
  • Title

    Thermal Oxidation Kinetics and Locos Isolation in Soi Materials

  • Author

    Crowder, Scott ; Griffin, P. ; Plummer, J.D.

  • Author_Institution
    Stanford University, CA
  • fYear
    1992
  • fDate
    6-8 Oct. 1992
  • Firstpage
    24
  • Lastpage
    25
  • Keywords
    Analytical models; Capacitance measurement; Electric variables measurement; Implants; Kinetic theory; Leakage current; Optical films; Oxidation; Reflectivity; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1992. IEEE International
  • Conference_Location
    Ponte Vedra Beach, FL
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.1992.664777
  • Filename
    664777
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1944826