Title :
Fabrication and evaluation of nanometer-size waveguide using scanning near-field optical microscope
Author :
Onuki, T. ; Watanabe, Y. ; Tani, T. ; Tokizaki, T.
Author_Institution :
Sci. Univ. of Tokyo, Chiba, Japan
Abstract :
Nanometer-size waveguides have been fabricated on metal films using anodic oxidation with a scanning near-field optical microscope (SNOM). Also the behavior of the light propagation in the waveguides has been studied using the same SNOM.
Keywords :
anodisation; metallic thin films; nanotechnology; near-field scanning optical microscopy; optical fabrication; optical waveguides; SNOM; anodic oxidation; fabrication; light propagation; metal films; nanometer-size waveguide; scanning near-field optical microscope; Atomic force microscopy; Electromagnetic waveguides; Optical device fabrication; Optical films; Optical microscopy; Optical polarization; Optical propagation; Optical waveguides; Probes; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967952
