Title :
Planar fabrication of multilayer piezoelectric actuator by groove cutting and electroplating
Author :
Suzuki, Gaku ; Esashi, Masayoshi
Author_Institution :
Venture Bus. Lab., Tohoku Univ., Sendai, Japan
Abstract :
This paper reports a new planar fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), were used for constructing the multilayer structure. Prototype actuators with 23-120 active layers were fabricated in this method. The measured displacement was 2.5 μm (23 layers) and 7.3 μm (120 layers) at 100 V, respectively. These values agree with the calculated values from the piezoelectric properties of the material
Keywords :
cutting; electroplating; laser beam etching; laser beam machining; microactuators; micromachining; multilayers; piezoelectric actuators; 100 V; bending displacement; deep grooves; dicing; electroplating; groove cutting; laser assisted etching; mechanism integrated actuators; multilayer piezoelectric actuator; planar fabrication; small actuator arrays; stacked actuators; tactile display; Ceramics; Electrodes; Etching; Low voltage; Metalworking machines; Nonhomogeneous media; Optical device fabrication; Piezoelectric actuators; Switches; Tape casting;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838488
