DocumentCode :
1945713
Title :
A new mechanism for Hillock formation over electrodeposited thin tin film
Author :
Cheng, Jing ; Chen, Samuel ; Vianco, Paul ; Li, James C.M.
Author_Institution :
Mater. Sci. Program, Univ. of Rochester, Rochester, NY
fYear :
2008
fDate :
27-30 May 2008
Firstpage :
472
Lastpage :
477
Abstract :
Tin film about one micron thick was electroplated over a silicon wafer pre-coated with a layer of Cr and another layer of Ni by evaporation. A special sample holder was designed to apply compressive stresses in the electroplated tin film. After incubation in a vacuum oven at 160degC for 7 days, huge hillocks about 10-30 mum diameter and 30-150 mum length grew with a density about 7 per square mm. On the top of the hillocks there appeared a polycrystalline layer similar to the tin film. FIB technique was used to reveal the inner microstructure of these huge hillocks. They are single crystals of Sn with [001] direction perpendicular to the film. The flow path of tin atoms appears to originate from the stressed Sn/Ni interface moving along the interface radially toward the root of the hillock.
Keywords :
electroplated coatings; electroplating; elemental semiconductors; focused ion beam technology; internal stresses; semiconductor growth; semiconductor thin films; tin; FIB technique; Sn; compressive stresses; electrodeposition; electroplating; evaporation; hillock; temperature 160 degC; thin film; time 7 day; Atomic layer deposition; Compressive stress; Fluid flow; Grain boundaries; Intermetallic; Material storage; Residual stresses; Stress measurement; Substrates; Tin; FIB; flow path; growth mechanism; tin hillocks; tin whiskers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2008. ECTC 2008. 58th
Conference_Location :
Lake Buena Vista, FL
ISSN :
0569-5503
Print_ISBN :
978-1-4244-2230-2
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2008.4550014
Filename :
4550014
Link To Document :
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