A high pressure-resistance micropump using active and normally-closed valves

Author

Shinohara, Jun ; Suda, Masayuki ; Furuta, Kazuyoshi ; Sakuhara, Toshihiko

Author_Institution

Seiko Instrum. Inc., Chiba, Japan

fYear

2000

fDate

23-27 Jan 2000

Firstpage

86

Lastpage

91

Abstract

A novel micropump that has two active and normally-closed valves was developed using micromachine technology. This micropump can pump in forward and backward direction, and hold the fluid without consuming energy even when the fluid source has some pressure. This normally-closed valve is manufactured in the way of filling up silicone rubber paste after bonding glass substrate and silicon substrate. This silicone rubber works as a “gate” for shutting off the flow. Therefore, high pressure-resistance micropump is realized with no influence of fabrication error. In this paper, basic characteristics of this micropump about flow rate, outlet pressure and pressure-resistance are described

Keywords

micropumps; microvalves; active valve; bonding; fabrication; glass substrate; high pressure-resistance micropump; micromachine technology; normally-closed valve; silicon substrate; silicone rubber paste; Bonding; Drug delivery; Energy consumption; Glass; Microfluidics; Micropumps; Pumps; Rubber; Silicon; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838495

Filename

838495