Ink jet fabricated nanoparticle MEMS

This paper presents a novel three-step process utilizing an ink jet print head to fabricate active MEMS devices. Both an in-plane and vertical thermal actuator with 100 μm lines are demonstrated, as well as a printed electrostatic linear drive motor. Fabrication of the devices is achieved by selective ink jet deposition of nanoparticles onto a surface of either glass or plastic. The ink jet printing of nanoparticles is shown to be a viable technology for building MEMS structures which consist of a large number of layers (>100), a diverse material set (metals, semiconductors, and insulators) and which have the ability to cover large areas. Such an approach represents a potential route to a complete desktop semiconductor fab