DocumentCode

1946065

Title

Total Dose Radiation Hardness of Bonded Soi Wafers

Author

McKitterick, John B. ; Caviglia, Anthony ; Goetz, George ; Maszara, W.P.

Author_Institution

Allied-Signal Aerospace Technology Center, Columbia, MD

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

38

Lastpage

39

Keywords

Annealing; Data mining; Etching; Insulation; Radiation hardening; Semiconductor films; Silicon on insulator technology; Temperature; Voltage; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664783

Filename

664783