Title :
One mask nickel micro-fabricated reed relay
Author :
Roth, S. ; Marxer, C. ; Feusier, G. ; de Rooij, N.F.
Author_Institution :
IMT, Neuchatel Univ., Switzerland
Abstract :
This paper reports on the fabrication and experimental results of a reed relay for end-course detection application. The end-course is detected by approaching an external magnet near the device. Nickel material has been chosen for the realisation of the device because of its good magnetic properties and its ability to be electrodeposited. The fabrication process requires a single photolithography step. The relay has been fabricated using a 55 μm thick positive resist photopatterning process developed in our laboratory. Electrical, static and dynamic characterisations have been performed. The final chip dimensions are 3 mm long, 1 mm wide and 0.4 mm thick
Keywords :
electrodeposition; electromagnetic actuators; microactuators; micromachining; nickel; photolithography; reed relays; 0.4 mm; 1 mm; 3 mm; 55 micron; Ni; dynamic characterisation; electrical characterisation; electrodeposited nickel; end-course detection application; fabrication process; micro-fabricated reed relay; one mask process; partial etching; positive resist photopatterning; single photolithography step; static characterisation; Connectors; Fabrication; Geometry; Lithography; Magnetic fields; Nickel; Relays; Resists; Springs; Switches;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838512
