Title :
Incorporation of Deuterium into the Buried Oxide of Simox Structures
Author :
Revesz, A.G. ; Myers, S.M. ; Brown, G.A. ; Hughes, H.L.
Author_Institution :
Texas Instruments, Inc., Dallas, TX
Keywords :
Annealing; Argon; Deuterium; Glass; Instruments; Laboratories; Nuclear measurements; Silicon compounds; Sputtering; Temperature;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664784
