Title :
Static friction in elastic adhesive MEMS contacts, models and experiment
Author :
Tas, N.R. ; Gui, C. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
Static friction in shearing mode can be expressed as the product of the shear strength of the interface and the real contact area. The influence of roughness on friction in elastic adhesive contact is analyzed. Special attention is paid to low loading conditions, in which the number of contact points is small. The models are used to analyze a friction experiment in a MEMS friction meter
Keywords :
adhesion; elastic deformation; elastic limit; mechanical contact; micromechanical devices; semiconductor device models; shear strength; sliding friction; stiction; surface topography; MEMS friction meter; contact mechanics; elastic adhesive MEMS contacts; elastic deformation; elastic limit; interface shear strength; low loading conditions; models; multi-asperity contact; real contact area; roughness influence; shearing mode; single asperity contact; sliding contacts; static friction; Adhesives; Friction; Microelectromechanical devices; Micromechanical devices; Micromotors; Rough surfaces; Shearing; Silicon; Surface roughness; Surface topography;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838515
