Design and fabrication of integrated solenoid inductors with magnetic cores

Author

Won Lee, Dok ; Hwang, Kyu-Pyung ; Wang, Shan X.

Author_Institution

Dept. of Mater. Sci. & Eng., Stanford Univ., Stanford, CA

fYear

2008

fDate

27-30 May 2008

Firstpage

701

Lastpage

705

Abstract

Integrated solenoid inductors with magnetic core were designed and fabricated. An inductance above 70 nH was achieved while keeping the coil resistance below 1 Omega and the device area below 1 mm². The inductance of the magnetic inductor was more than 30 times that of the air core inductor of the identical geometry, and the inductance density reached above 200 nH/mm². Comparison with the planar spiral inductor shows that the solenoid inductor is significantly more efficient when the magnetic core is used. Our results indicate that integrated magnetic inductors suitable for mobile power conversion and RF system-on-chip circuits can be reliably designed and fabricated.

Keywords

inductors; magnetic cores; solenoids; superconducting magnets; system-on-chip; RF system-on-chip circuits; air core inductor; integrated solenoid inductor design; integrated solenoid inductor fabrication; integrated solenoid inductors; magnetic cores; mobile power conversion; planar spiral inductor; Coils; Fabrication; Geometry; Inductance; Inductors; Magnetic cores; Power conversion; Power system reliability; Solenoids; Spirals;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2008. ECTC 2008. 58th

Conference_Location

Lake Buena Vista, FL

ISSN

0569-5503

Print_ISBN

978-1-4244-2230-2

Electronic_ISBN

0569-5503

Type

conf

DOI

10.1109/ECTC.2008.4550049

Filename

4550049