• DocumentCode
    1946556
  • Title

    Resin coated copper capacitive (RC3) nanocomposites for multilayer embedded capacitors

  • Author

    Das, Rabindra N. ; Rosser, Steven G. ; Papathomas, Konstantinos I. ; Poliks, Mark D. ; Lauffer, John M. ; Markovich, Voya R.

  • Author_Institution
    Endicott Interconnect Technol., Inc., Endicott, NY
  • fYear
    2008
  • fDate
    27-30 May 2008
  • Firstpage
    729
  • Lastpage
    735
  • Abstract
    This paper discusses thin film technology based on resin coated copper capacitive (RC3) nanocomposites. In particular, we highlight recent developments on high capacitance, large area, thin film passives, their integration in printed wiring boards (PWB), system in package (SiP) and chip package substrates and the reliability of the embedded capacitors. A variety of RC3 nanocomposite thin films ranging from 2 microns to 50 microns thick were processed on PWB substrates by liquid coating or printing processes. SEM micrographs showed uniform particle distribution in the coatings. The electrical performance of composites was characterized by dielectric constant (Dk), capacitance and dissipation factor (loss) measurements. Nanocomposites resulted in high capacitance density (7-500 nF/inch2) at 1 MHz. The manufacturability of these films and their reliability has been tested using large area (13 inch times 18 inch or 19.5 inch times24 inch) test vehicles. Reliability of the RC3 nanocomposite was ascertained by IR-reflow, PCT (pressure cooker test) and solder shock. As a case study, an example of RC3 based multilayer embedded capacitor construction for a flip-chip plastic ball grid array package with a 300 mum core via pitch is given. This effort is an integrated approach centering on three interrelated fronts: (1) materials development and characterization; (2) fabrication, and (3) integration at the device level.
  • Keywords
    ball grid arrays; capacitance; chip scale packaging; copper; integrated circuit reliability; nanocomposites; printed circuits; resins; semiconductor thin films; system-in-package; thin film capacitors; IR-reflow; SEM micrograph; capacitance; chip package substrate; dielectric constant; dissipation facto; flip-chip plastic ball grid array package; liquid coating; multilayer embedded capacitors; pressure cooker test; printed wiring board; printing process; reliability; resin coated copper capacitive nanocomposite; size 2 micron to 50 micron; solder shock; system in package; thin film passives; thin film technology; Capacitance; Capacitors; Copper; Nanocomposites; Nonhomogeneous media; Packaging; Resins; Substrates; Testing; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2008. ECTC 2008. 58th
  • Conference_Location
    Lake Buena Vista, FL
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4244-2230-2
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2008.4550054
  • Filename
    4550054