DocumentCode

1946643

Title

Statistical Analysis of Silicon Defect Densities in Simox

Author

Allen, L.P. ; Genis, A. ; Krull, W.

Author_Institution

Ibis Technology Corporation, Danvers, MA

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

44

Lastpage

45

Keywords

Analysis of variance; Chemicals; Circuits; Density measurement; Etching; Implants; Raman scattering; Silicon; Statistical analysis; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664786

Filename

664786