• DocumentCode
    1946727
  • Title

    Microfabrication technology for polycaprolactone, a biodegradable polymer

  • Author

    Armani, Deniz K. ; Liu, Chang

  • Author_Institution
    Microelectron. Lab., Illinois Univ., Urbana, IL, USA
  • fYear
    2000
  • fDate
    23-27 Jan 2000
  • Firstpage
    294
  • Lastpage
    299
  • Abstract
    In this paper, we report the development of micromachining techniques for a biodegradable polymer for the first time. By virtue of their ability to naturally degrade in tissues, biodegradable polymers hold immense promise as new materials for implantable biomedical microdevices. This work focuses on establishment of microfabrication processes for biodegradable microstructures and microdevices. Three unique fabrication processes have been established: (1) micro-molding process to form 3D microstructures in polycaprolactone (PCL) via a silicon micromachined mold; (2) a method of transferring metal patterns to surfaces of PCL substrates; (3) techniques for sealing both dry and liquid-filled PCL micro-cavities with a metal thin film (e.g. gold). Chemical compatibility of PCL with common micromachining chemicals have been investigated
  • Keywords
    biological techniques; biomedical electronics; elemental semiconductors; metallic thin films; micromachining; micromechanical devices; moulding; polymer films; prosthetics; seals (stoppers); semiconductor device metallisation; silicon; 3D microstructures; Au; PCL substrates; Si; Si micromachined mold; biodegradable microstructures; biodegradable polymer; chemical compatibility; dry micro-cavities; implantable biomedical microdevices; liquid-filled PCL micro-cavities; metal patterns; metal thin film; micro-molding; micromachining; micromachining chemicals; sealing; Biodegradable materials; Biological materials; Biomedical materials; Chemicals; Fabrication; Micromachining; Microstructure; Polymers; Silicon; Thermal degradation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
  • Conference_Location
    Miyazaki
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5273-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2000.838532
  • Filename
    838532