DocumentCode
1946727
Title
Microfabrication technology for polycaprolactone, a biodegradable polymer
Author
Armani, Deniz K. ; Liu, Chang
Author_Institution
Microelectron. Lab., Illinois Univ., Urbana, IL, USA
fYear
2000
fDate
23-27 Jan 2000
Firstpage
294
Lastpage
299
Abstract
In this paper, we report the development of micromachining techniques for a biodegradable polymer for the first time. By virtue of their ability to naturally degrade in tissues, biodegradable polymers hold immense promise as new materials for implantable biomedical microdevices. This work focuses on establishment of microfabrication processes for biodegradable microstructures and microdevices. Three unique fabrication processes have been established: (1) micro-molding process to form 3D microstructures in polycaprolactone (PCL) via a silicon micromachined mold; (2) a method of transferring metal patterns to surfaces of PCL substrates; (3) techniques for sealing both dry and liquid-filled PCL micro-cavities with a metal thin film (e.g. gold). Chemical compatibility of PCL with common micromachining chemicals have been investigated
Keywords
biological techniques; biomedical electronics; elemental semiconductors; metallic thin films; micromachining; micromechanical devices; moulding; polymer films; prosthetics; seals (stoppers); semiconductor device metallisation; silicon; 3D microstructures; Au; PCL substrates; Si; Si micromachined mold; biodegradable microstructures; biodegradable polymer; chemical compatibility; dry micro-cavities; implantable biomedical microdevices; liquid-filled PCL micro-cavities; metal patterns; metal thin film; micro-molding; micromachining; micromachining chemicals; sealing; Biodegradable materials; Biological materials; Biomedical materials; Chemicals; Fabrication; Micromachining; Microstructure; Polymers; Silicon; Thermal degradation;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location
Miyazaki
ISSN
1084-6999
Print_ISBN
0-7803-5273-4
Type
conf
DOI
10.1109/MEMSYS.2000.838532
Filename
838532
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