Title :
Microfabrication technology for polycaprolactone, a biodegradable polymer
Author :
Armani, Deniz K. ; Liu, Chang
Author_Institution :
Microelectron. Lab., Illinois Univ., Urbana, IL, USA
Abstract :
In this paper, we report the development of micromachining techniques for a biodegradable polymer for the first time. By virtue of their ability to naturally degrade in tissues, biodegradable polymers hold immense promise as new materials for implantable biomedical microdevices. This work focuses on establishment of microfabrication processes for biodegradable microstructures and microdevices. Three unique fabrication processes have been established: (1) micro-molding process to form 3D microstructures in polycaprolactone (PCL) via a silicon micromachined mold; (2) a method of transferring metal patterns to surfaces of PCL substrates; (3) techniques for sealing both dry and liquid-filled PCL micro-cavities with a metal thin film (e.g. gold). Chemical compatibility of PCL with common micromachining chemicals have been investigated
Keywords :
biological techniques; biomedical electronics; elemental semiconductors; metallic thin films; micromachining; micromechanical devices; moulding; polymer films; prosthetics; seals (stoppers); semiconductor device metallisation; silicon; 3D microstructures; Au; PCL substrates; Si; Si micromachined mold; biodegradable microstructures; biodegradable polymer; chemical compatibility; dry micro-cavities; implantable biomedical microdevices; liquid-filled PCL micro-cavities; metal patterns; metal thin film; micro-molding; micromachining; micromachining chemicals; sealing; Biodegradable materials; Biological materials; Biomedical materials; Chemicals; Fabrication; Micromachining; Microstructure; Polymers; Silicon; Thermal degradation;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838532