Ion charge state distribution in the ECR source with pumping by millimeter-wave gyrotron radiation

Author

Golubev, S.V. ; Razin, S.V. ; Zorin, V.G.

Author_Institution

Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia

fYear

1997

fDate

19-22 May 1997

Firstpage

326

Lastpage

327

Abstract

Summary form only given. The essential increase of ECR multiply charged ion (MCI) source efficiency (that is the increase of the average charge number and current ion beams) connects with the possibility of achieving a more dense plasma and transfer to a so called quasi gas dynamic regime of the plasma confinement in magnetic traps under the use of pumping with higher frequency. The first results of an experimental investigation of ion charge state distribution in a pulse source of MCI with pumping by millimeter wave radiation of powerful gyrotron are presented.

Keywords

gyrotrons; magnetic traps; millimetre wave tubes; plasma production; ECR source; current ion beams; dense plasma; ion charge state distribution; magnetic traps; millimeter-wave gyrotron radiation; multiply charged ion; plasma confinement; quasi gas dynamic regime; Boron; Doping; Gyrotrons; Millimeter wave technology; Plasma confinement; Plasma density; Plasma immersion ion implantation; Plasma sources; Substrates; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on

Conference_Location

San Diego, CA, USA

ISSN

0730-9244

Print_ISBN

0-7803-3990-8

Type

conf

DOI

10.1109/PLASMA.1997.605218

Filename

605218