Title :
A foundry fabricated high-speed rotation sensor using off-chip RF wireless signal transmission
Author :
Sun, Winston ; Ho, Antony W T ; Li, Wen J. ; Mai, John D. ; Mei, Tao
Author_Institution :
Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Shatin, Hong Kong
Abstract :
A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm2 was developed using the MCNC Multi-User MEMS Processes (MUMPs). This paper reports the initial characterization of the sensor, including rotation and vibration tests. Initial results indicate that this piezoresistive sensor is capable of wirelessly measuring rotation speeds at ~2Hz/rpm/V with 5V input in the 100 to 6000 rpm rotation range. We believe our groundwork will allow the MEMS community to use the MUMPs foundry service to design simple and reliable high-speed rotation sensors that can be interfaced with commercial wireless chips for signal transmission
Keywords :
angular measurement; high-speed techniques; micromachining; microsensors; piezoresistive devices; remote sensing; 5 V; MCNC multi-user MEMS process; MUMPs foundry fabrication; noncontact high-speed rotation sensor; off-chip RF wireless signal transmission; piezoresistive sensor; surface micromachining; Foundries; Micromechanical devices; Piezoresistance; Radio frequency; Rotation measurement; Semiconductor device measurement; Sensor phenomena and characterization; Signal design; Testing; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838543
