Batch fabricated flat winding shape memory alloy actuator for active catheter

Author

Mineta, T. ; Mitsui, T. ; Watanabe, Y. ; Kobayashi, S. ; Haga, Yoichi ; Esashi, M.

Author_Institution

Yamagata Res. Inst. of Technol., Japan

fYear

2000

fDate

23-27 Jan 2000

Firstpage

375

Lastpage

380

Abstract

Batch fabrication process of a shape memory alloy (SMA) sheet based on electrochemical pulsed etching with a sacrificial dummy metal layer has been studied and flat winding S-shape SMA actuators have been developed. The actuators are 38 μm in thickness and generated forces from 40 to 95 mN were obtained according to the width from 410 to 170 μm. The flat winding SMA actuator could realize active catheter with small outer diameter and wide inner working channel. The batch fabrication process was also applied to micromachining of NiTi super elastic alloy (SEA) for biasing spring of the catheter

Keywords

batch processing (industrial); biomedical equipment; electrolytic machining; etching; microactuators; micromachining; shape memory effects; 38 mum; 410 to 170 mum; NiTi; NiTi super elastic alloy; SMA actuators; active catheter; batch fabrication; biasing spring; electrochemical pulsed etching; flat winding S-shape actuators; micromachining; patient diagnosis; patient therapy; sacrificial dummy metal layer; shape memory alloy actuator; Actuators; Catheters; Coils; Counting circuits; Electrodes; Etching; Micromachining; Optical device fabrication; Shape memory alloys; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838546

Filename

838546