Title :
Performance enhancement of a closed-loop accelerometer tuned close to its instability regime
Author :
Korniienko, A. ; Colinet, E. ; Condemine, C.
Author_Institution :
CEA-LETI-MINATEC, Grenoble, France
fDate :
June 28 2009-July 1 2009
Abstract :
A closed-loop micro-accelerometer is presented where its instability regime is used in order to enhance its static gain. Sensitivity functions are increased in low frequencies and therefore any acceleration applied on the proof mass is better rejected than in conventional closed-loop approach. To design a robust controller, an identification procedure of the instable structure is presented as well. Finally the signal reconstruction of the applied acceleration is made trough a Kalman filter. Simulation results are given and demonstrate the efficiency of the proposed approach.
Keywords :
Kalman filters; accelerometers; closed loop systems; micromechanical devices; robust control; signal reconstruction; Kalman filter; closed-loop microaccelerometer; instability regime; proof mass; robust controller; sensitivity function; signal reconstruction; Acceleration; Accelerometers; Capacitance; Displacement control; Electrodes; Electrostatic actuators; Force feedback; Frequency; Performance gain; Weight control;
Conference_Titel :
Circuits and Systems and TAISA Conference, 2009. NEWCAS-TAISA '09. Joint IEEE North-East Workshop on
Conference_Location :
Toulouse
Print_ISBN :
978-1-4244-4573-8
Electronic_ISBN :
978-1-4244-4574-5
DOI :
10.1109/NEWCAS.2009.5290485