Title :
Some Aspects of the Scanning Acoustic Microscope Contributions in the Evaluation of Device Reliability
Author :
Saird, A. ; Du Chaffaut, C.Amaudric ; Saurel, J.M. ; Attal, J.
Author_Institution :
Laboratoire d´´Automatique et de Microélectronique, Unliversité des Sciences et Techniques du Languedoc, F-34060 Montpellier Cedex, France
Abstract :
The scanning acoustic microscope, a technique suited to non-destructive investigations of microelectronic devices is presented in this paper. Specific applications are carried out on structures typically encountered in most of semiconductor components.
Keywords :
Acoustic devices; Acoustic waves; Bonding; Circuits; Frequency; Lenses; Microscopy; Optical materials; Optical surface waves; Surface acoustic waves;
Conference_Titel :
Solid State Device Research Conference, 1988. ESSDERC '88. 18th European
Conference_Location :
Montpellier, France
