Title :
Electrical testing for MEMS´s piezoresistive pressure sensor
Author :
Wahab, Mohd Zahrin b Abd ; Sauli, Zaliman B. ; Ahmad, Ibrahim ; Suradi, Walid B.
Author_Institution :
MIMOS Berhad
Keywords :
Boron; Circuit testing; Fabrication; Foundries; MIMO; Micromechanical devices; Piezoresistance; Sensor phenomena and characterization; Silicon; Stress;
Conference_Titel :
Sensors, 2003. AsiaSense 2003. Asian Conference on
Print_ISBN :
0-7803-8101-7
DOI :
10.1109/ASENSE.2003.1224989
