Title :
Micromachined dispenser with high flow rate and high resolution
Author :
Koide, Akira ; Sasaki, Yasuhiko ; Yoshimura, Yuki ; Miyake, Ryo ; Terayama, Takao
Author_Institution :
Mech. Eng. Res. Lab., Hitachi Ltd., Ibaraki, Japan
Abstract :
A micromachined dispenser with a high flow rate and high resolution for chemical analysis is described. The flow rate as a function of the actuation frequency increases linearly up to a frequency of 700 Hz with a final value of about 148 μl/s using water as a pump medium. The dispensing accuracy is better than 1% (coefficient of variance) at a dispensing volume of 56 μl. This dispenser shows good dispensing performance thanks to its precise valve structure and surface-treated nozzle
Keywords :
chemical analysis; diaphragms; etching; laboratory techniques; microactuators; micromachining; microvalves; piezoelectric actuators; 700 Hz; actuation frequency; chemical analysis application; dispensing accuracy; high flow rate; high resolution; micromachined dispenser; microvalves; piezoelectrically-driven diaphragm actuator; precise valve structure; surface-treated nozzle; Anisotropic magnetoresistance; Bonding; Chemical analysis; Chemical industry; Etching; Laboratories; Mechanical engineering; Piezoelectric actuators; Silicon; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838555
