Drop in process control checkerboard test structure for efficient online process characterization and defect problem debugging

Author

Hess, Christopher ; Weiland, Larg H.

Author_Institution

Inst. of Comput. Design & Fault Tolerance, Karlsruhe Univ., Germany

fYear

1994

fDate

22-25 Mar 1994

Firstpage

152

Lastpage

159

Abstract

A novel diode-checkerboard test structure (DCTS) is presented to determine open circuit defects and short circuit defects as well as to investigate the 3D-influence of underlying topography. The arrangement of the DCTS in a standard boundary pad frame and the digital measuring procedure evaluate a fast and effective (efficient) online process characterization. The precise defect detection and localization facilitate an additional optical defect problem debugging

Keywords

integrated circuit manufacture; integrated circuit testing; process control; defect problem debugging; digital measuring procedure; diode-checkerboard test structure; online process characterization; open circuit defects; short circuit defects; standard boundary pad frame; Circuit faults; Circuit testing; Debugging; Discrete cosine transforms; Electrical resistance measurement; Measurement standards; Optical sensors; Process control; Semiconductor device manufacture; Semiconductor device measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-1757-2

Type

conf

DOI

10.1109/ICMTS.1994.303485

Filename

303485