Title :
Drop in process control checkerboard test structure for efficient online process characterization and defect problem debugging
Author :
Hess, Christopher ; Weiland, Larg H.
Author_Institution :
Inst. of Comput. Design & Fault Tolerance, Karlsruhe Univ., Germany
Abstract :
A novel diode-checkerboard test structure (DCTS) is presented to determine open circuit defects and short circuit defects as well as to investigate the 3D-influence of underlying topography. The arrangement of the DCTS in a standard boundary pad frame and the digital measuring procedure evaluate a fast and effective (efficient) online process characterization. The precise defect detection and localization facilitate an additional optical defect problem debugging
Keywords :
integrated circuit manufacture; integrated circuit testing; process control; defect problem debugging; digital measuring procedure; diode-checkerboard test structure; online process characterization; open circuit defects; short circuit defects; standard boundary pad frame; Circuit faults; Circuit testing; Debugging; Discrete cosine transforms; Electrical resistance measurement; Measurement standards; Optical sensors; Process control; Semiconductor device manufacture; Semiconductor device measurement;
Conference_Titel :
Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-1757-2
DOI :
10.1109/ICMTS.1994.303485
