DocumentCode

1947543

Title

Detection of 0.3/spl mu/m Particles on Fully Processed Simox Wafers

Author

Genis, A. ; Krull, W. ; Lalezari, R. ; Turner, J.

Author_Institution

Ibis Technology Corp.

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

58

Lastpage

59

Keywords

Histograms; Lakes; Materials testing; Optical materials; Particle scattering; Performance analysis; Polarization; Signal analysis; Surface emitting lasers; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664793

Filename

664793