Title :
A Novel Approach for an Electrical Vernier to Measure Mask Misalignment
Author :
Walton, A.J. ; Ward, D. ; Robertson, J.M ; Holwill, R.J.
Author_Institution :
Edinburgh Microfabrication Facility, Department of Electrical Engineering, Kings Buildings, University of Edinburgh, Edinburgh, EH9 3JL, UK.
Abstract :
A novel interconnect scheme is presented which reduces the number of pads required by electrical verniers to measure mask misalignment. It makes the use of a shift register no longer necessary to keep the pad count to a reasonable number and the process is only required to support the fabrication of diodes. The vernier can be measured using any test equipment which can test for continuity.
Keywords :
Circuit testing; Density measurement; Diodes; Electric variables measurement; Integrated circuit interconnections; Integrated circuit testing; Shift registers; Teeth; Time measurement; Winches;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
