DocumentCode :
1948090
Title :
Proceedings of 1994 IEEE International Conference on Microelectronic Test Structures
fYear :
1994
fDate :
22-25 March 1994
Abstract :
The following topics were dealt with: parameter extraction; device characterization; dimensional measurements; reliability; process characterization; yield
Keywords :
integrated circuit technology; integrated circuit testing; reliability; semiconductor device testing; semiconductor technology; spatial variables measurement; device characterization; dimensional measurements; microelectronic test structure; parameter extraction; process characterization; reliability; yield;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-1757-2
Type :
conf
DOI :
10.1109/ICMTS.1994.303514
Filename :
303514
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1948090
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