Development of injectable polymer-derived ceramics for high temperature MEMS

Author

An, Linan ; Zhang, Wenge ; Bright, Victor M. ; Dunn, Martin L. ; Raj, Rishi

Author_Institution

Dept. of Mech. Eng., Colorado Univ., Boulder, CO, USA

fYear

2000

fDate

23-27 Jan 2000

Firstpage

619

Lastpage

623

Abstract

In this paper, a novel processing technique for fabrication of high temperature MEMS is reported. The process consists of four steps: (1) casting a liquid polymer precursor into molds with desired structures; (2) heating the filled mold for thermosetting the polymer; (3) bonding different solid polymer parts together using the same liquid polymer as an adhesive; (4) converting the polymer to a ceramic by thermal decomposition. The technology allows implementation of MEMS components with complex three-dimensional, multi-layer structures. The resultant polymer-derived ceramics, based-on amorphous alloys of silicon, carbon and nitrogen, can be used at temperatures up to 1500°C

Keywords

adhesion; amorphous semiconductors; casting; ceramics; heat treatment; joining processes; micromachining; micromechanical devices; polymers; pyrolysis; 1500 C; 3D complex multi-layer structures; SiCN; amorphous alloys; bonding; casting; heating; high temperature MEMS; injectable polymer-derived ceramics; liquid polymer precursor; polymer-derived ceramics; thermal decomposition; thermosetting; Amorphous materials; Bonding; Casting; Ceramics; Fabrication; Heating; Micromechanical devices; Polymers; Temperature; Thermal decomposition;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838589

Filename

838589