Title :
Micromachined rubber O-ring micro-fluidic couplers
Author :
Yao, Tze-Jung ; Lee, Sangwook ; Fang, Weileun ; Tai, Yu-Chong
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
In this paper, we present a novel type of a “quick-connect” for micro-fluidic devices realized by a simple silicone-rubber O-ring MEMS coupler. As shown in this work, the proposed O-ring couplers are easy to fabricate and utilize, reusable, can withstand high pressure (>60 psi), and provide good seals. In the paper, results from both the leak rate test and pull-out test are presented, demonstrating the functionality of the O-ring couplers
Keywords :
interconnections; microfluidics; seals (stoppers); silicone rubber; testing; 60 psi; leak rate test; micromachined micro-fluidic couplers; pull-out test; quick-connect; reusability; seals; silicone-rubber O-ring MEMS coupler; Couplers; Etching; Fabrication; Microfluidics; Micromechanical devices; Rubber; Seals; Silicon; Structural rings; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838590
