Title :
CMOS Integrated Chemical Microsensors and the Electronic Nose
Author :
Baltes, Henry ; Brand, Oliver
Author_Institution :
ETH, Zurich, Switzerland
Keywords :
CMOS technology; Chemical industry; Chemical sensors; Chemical technology; Electronic noses; Etching; Infrared sensors; Microsensors; Sensor arrays; Silicon;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
