Title :
Silicon-on-Diamond Technology
Author :
Annamalai, N.K. ; Fechner, Paul ; Sawyer, Jon
Author_Institution :
Department of Electrical and Computer Engineering, Northeastern University, Boston, MA
Keywords :
Capacitance-voltage characteristics; Conducting materials; Dielectrics and electrical insulation; Integrated circuit technology; MISFETs; MOS capacitors; Silicon on insulator technology; Substrates; Temperature; Thermal conductivity;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664796