Microscale tribology (friction) measurement and influence of crystal orientation and fabrication process

Author

Chen, Quanfang ; Carman, Greg P.

Author_Institution

Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA

fYear

2000

fDate

23-27 Jan 2000

Firstpage

657

Lastpage

661

Abstract

A microscale tribology test system has been developed at UCLA to measure friction and wear in MEMS components. Test results indicate that microscale friction may not follow Amontons´ law that states the friction force is only related to the normal force with a coefficient of friction. In this study, test data indicate that the friction coefficient is not constant and it´s influenced by crystal orientation, apparent contact area, MEMS material, and fabrication process, as well as the normal force applied. Explanation for the discrepancy may be related to adhesion, which is a critical issue at microscale

Keywords

crystal orientation; friction; micromechanical devices; wear; Amontons law; MEMS component; adhesion; crystal orientation; fabrication; friction measurement; microscale tribology; test system; wear measurement; Atomic force microscopy; Atomic measurements; Copper; Fabrication; Force measurement; Friction; Micromechanical devices; Surface morphology; System testing; Tribology;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838596

Filename

838596