1948392

SOI Devices and Technology

Antoniadis, Dimitri A. ; Wei, Andy ; Lochtefeld, Anthony

Massachusetts Institute of Technology, USA

1

1999

13-15 Sept. 1999

81

87

CMOS integrated circuits; CMOS technology; Circuit synthesis; Integrated circuit interconnections; Laboratories; MOSFET circuits; Manufacturing; Microprocessors; Semiconductor films; Silicon on insulator technology;

English

ieee

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Leuven, Belgium

2-86332-245-1

conf

1505452