DocumentCode :
1948438
Title :
Microconnectors for the passive alignment of optical waveguides and ribbon optical fibers
Author :
Kaou, N. ; Armbruster, V. ; Jeannot, J.C. ; Mollier, P. ; Porte, H. ; Devoldere, N. ; de Labachelerie, M.
Author_Institution :
Inst. des Microtech. de Franche-Comte, Besancon, France
fYear :
2000
fDate :
23-27 Jan 2000
Firstpage :
692
Lastpage :
697
Abstract :
This paper describes the fabrication of a new mechanical microconnector, which is used for the precise optical self-alignment of multi-waveguide Optical Integrated Circuits (OIC) to ribbon optical fibers, without injecting light in the fiber. Nickel alignment pins are electrodeposited on the OIC using a photolithographic process, and the pins are inserted into suitable openings made on a silicon micromachined platform, on which optical fibers are accurately positioned using V-grooves. Design and fabrication issues are reported, as well as preliminary experimental results which show that excess optical losses on the order of 3 dB can be obtained
Keywords :
electrodeposition; electrodeposits; etching; micro-optics; micromachining; nickel; optical directional couplers; optical fibre couplers; optical losses; optical planar waveguides; photolithography; 3 dB; Ni; Si; V-grooves; anisotropic etching; design issues; electrodeposited; excess optical losses; fabrication issues; multi-waveguide optical integrated circuits; mushroom shape pin; nickel alignment pins; optical coupling; optical waveguides; optomechanical microconnector; passive alignment; photolithographic process; positioning accuracy; precise optical self-alignment; ribbon optical fibers; silicon micromachined platform; Integrated optics; Nickel; Optical design; Optical device fabrication; Optical fibers; Optical losses; Optical waveguides; Photonic integrated circuits; Pins; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
ISSN :
1084-6999
Print_ISBN :
0-7803-5273-4
Type :
conf
DOI :
10.1109/MEMSYS.2000.838602
Filename :
838602
Link To Document :
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