DocumentCode
1948628
Title
Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family
Author
Ikuta, Koji ; Hasegawa, Tadahiro ; Adachi, Takao ; Maruo, Shoji
Author_Institution
Sch. of Eng., Nagoya Univ., Japan
fYear
2000
fDate
23-27 Jan 2000
Firstpage
739
Lastpage
744
Abstract
Versatile micro fluidic device “Biochemical IC Family” based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come
Keywords
biochemistry; microfluidics; micropumps; microvalves; 3D composite structure; Biochemical IC Family; Hybrid IH Process; UV polymer; biochemical IC; concentrator; fabrication; fluid drive chip; luminous firefly enzyme synthesis; micro stereo lithography; microfluidic device; pump; reactor; shape memory alloy microactuator; switching valve; Biochemistry; Chemicals; Fluidic microsystems; Inductors; Lithography; Microactuators; Microfluidics; Pumps; Shape memory alloys; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location
Miyazaki
ISSN
1084-6999
Print_ISBN
0-7803-5273-4
Type
conf
DOI
10.1109/MEMSYS.2000.838610
Filename
838610
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