• DocumentCode
    1948628
  • Title

    Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family

  • Author

    Ikuta, Koji ; Hasegawa, Tadahiro ; Adachi, Takao ; Maruo, Shoji

  • Author_Institution
    Sch. of Eng., Nagoya Univ., Japan
  • fYear
    2000
  • fDate
    23-27 Jan 2000
  • Firstpage
    739
  • Lastpage
    744
  • Abstract
    Versatile micro fluidic device “Biochemical IC Family” based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come
  • Keywords
    biochemistry; microfluidics; micropumps; microvalves; 3D composite structure; Biochemical IC Family; Hybrid IH Process; UV polymer; biochemical IC; concentrator; fabrication; fluid drive chip; luminous firefly enzyme synthesis; micro stereo lithography; microfluidic device; pump; reactor; shape memory alloy microactuator; switching valve; Biochemistry; Chemicals; Fluidic microsystems; Inductors; Lithography; Microactuators; Microfluidics; Pumps; Shape memory alloys; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
  • Conference_Location
    Miyazaki
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5273-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2000.838610
  • Filename
    838610