Formation of polysilicon nanowires as transducer for biosensor using plasma trimming process

Research on nanowire structures, behavior and material properties are very wide present day. Beside those matters, techniques and methods are using to produces nanowire also are still in studies in order to escalate the formations of nanowire. Nanowire applications are widely use and it mostly for electronic devices that involve with nanometer scale features, measures and detections or sensors. This study will explore previous works and expose the formation of nanowires using different material and process or technique which are polysilicon as material and dry etching processfor reasons to reduce cost, improving the structures and process in order to get good profile and structures that same with the other processes and materials that seem very costly and complicated. Plus this project also elaborate the important things that related with nanowires such as structure sizes, fabrication technique will be used and applications involve.