DocumentCode
1948884
Title
Development of chain-type micromachine for inspection of outer tube surfaces (basic performance of the 1st prototype)
Author
Takeda, Munehisa ; Namura, Koji ; Nakamura, Kunihiko ; Shibaike, Narito ; Haga, Tatsuya ; Takada, Hiroshi
Author_Institution
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
fYear
2000
fDate
23-27 Jan 2000
Firstpage
805
Lastpage
810
Abstract
Using micromachine technology, we have developed the first prototype of a multiple distributed micromachine system, in which a micromachine can be driven in both the horizontal and vertical directions and automatically connect to and disconnect from adjacent micromachines. The developed micromachine is the world´s smallest machine (width: 9 mm, length: 5 mm, height: 6.5 mm, weight: 0.42 g) that can travel in both the horizontal and vertical directions. This paper gives an overview of the prototype and its travel and connection/disconnection performance. The following conclusions were obtained: (1) The developed magnetic wheel-driven micromachine is able to travel both horizontally and vertically. (2) Automatic connection and disconnection are realized by using newly developed microconnectors
Keywords
inspection; micromechanical devices; small electric machines; chain-type micromachine; inspection; magnetic wheel; microconnector; multiple distributed system; outer tube surface; prototype; Cities and towns; Connectors; Inspection; Laboratories; Power generation; Prototypes; Research and development; Space exploration; Space technology; Stator cores;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location
Miyazaki
ISSN
1084-6999
Print_ISBN
0-7803-5273-4
Type
conf
DOI
10.1109/MEMSYS.2000.838621
Filename
838621
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