DocumentCode
1949000
Title
Feature Extraction of Waveform Signals for Uncertain Dynamic Processes Using Neural Networks
Author
Chang, Yaw-Jen ; Chang, Chi-Tim ; Tsai, Jui-Ju
Author_Institution
Chung Yuan Christian Univ., Chung Li
fYear
2007
fDate
12-17 Aug. 2007
Firstpage
2427
Lastpage
2431
Abstract
This paper presents a novel and simple feature extraction approach for drawing out the signal characteristics of uncertain dynamic processes by the feature neurons. Kohonen network is used to construct the feature neurons to represent its respective local features of a waveform signal. For a class of waveform signals, groups of feature neurons can be obtained. Incorporating with the ellipsoidal calculus, this approach can extract the process drifts and abnormal deviations in the process characteristics by limit checking. Moreover, it is robust even for the process with different process time durations. For the system with oscillatory transient response, this approach can be iteratively used to augment the amount of feature neurons to analyze the characteristics of any portion of the signal of interest in detail. With the merit of unsophisticatedness, this approach can be implemented for the determination of preventive maintenance and fault detection in the semiconductor manufacturing.
Keywords
fault location; feature extraction; neural nets; preventive maintenance; transient response; uncertain systems; Kohonen network; ellipsoidal calculus; fault detection; feature extraction; feature neuron; neural networks; oscillatory transient response; preventive maintenance; semiconductor manufacturing; uncertain dynamic process; waveform signals; Calculus; Fault detection; Feature extraction; Neural networks; Neurons; Preventive maintenance; Robustness; Signal analysis; Signal processing; Transient response;
fLanguage
English
Publisher
ieee
Conference_Titel
Neural Networks, 2007. IJCNN 2007. International Joint Conference on
Conference_Location
Orlando, FL
ISSN
1098-7576
Print_ISBN
978-1-4244-1379-9
Electronic_ISBN
1098-7576
Type
conf
DOI
10.1109/IJCNN.2007.4371338
Filename
4371338
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