DocumentCode
1949770
Title
Evenina panel discussion - Session 21
fYear
2004
fDate
6-6 Oct. 2004
Firstpage
473
Lastpage
473
Abstract
Micro-electromechanical systems, or MEMS, and nanotechnology have been billed as "The Next Big Thing" by many industry analysts. Technology companies and government laboratories have been pouring billions of dollars into research and development into the design and manufacturing processes which allow tiny mechanical devices such as sensors for temperature, pressure, and vibration, valves, actuators, micro mirrors, gyroscopes, and other micro-scale mechanical devices to be embedded into semiconductor chips. Commercial applications for MEMS range from automotive where MEMS sensors are used for pressure and acceleration measurement or airbag deployment, to optical telecommunications RF switches, to construction where building materials sense changes in mechanical stresses and medical applications where MEMS are used in micron-sized blood pressure sensors, disposable angioplasty devices which monitor pressure in balloon catheters, kidney dialysis pressure sensors or airflow sensors in respiratory equipment. But is the price tag too high for MEMS development and manufacturing, which has been estimated by Vertical Market Research at $3.3 billion US R&D dollars by 2007, and will the payback be too little too late?
fLanguage
English
Publisher
ieee
Conference_Titel
Custom Integrated Circuits Conference, 2004. Proceedings of the IEEE 2004
Conference_Location
Orlando, FL, USA
Print_ISBN
0-7803-8495-4
Type
conf
DOI
10.1109/CICC.2004.1358854
Filename
1358854
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