DocumentCode
1949823
Title
MEMS-based piezoelectric micropump for precise liquid handling
Author
Johari, Juliana ; Majlis, Burhanuddin Yeop
Author_Institution
Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia
fYear
2012
fDate
11-12 Sept. 2012
Firstpage
1
Lastpage
4
Abstract
A micropump is described which uses a piezoelectric actuator to deliver liquid from pump pulsations at volumetric flow rates approaching nl min-1 even at high loading levels (high output pressures). This micropump uses a bimorph which bends when a voltage is applied to the piezo-actuator. By inserting valves into the device, the pump can operate continuously with volumetric pumping rate determined by the frequency of the driving voltage to the pump chamber.
Keywords
microactuators; micromechanical devices; micropumps; piezoelectric actuators; MEMS-based piezoelectric micropump; bimorph; liquid handling; piezo-actuator; piezoelectric actuator; pump chamber; pump pulsations; volumetric pumping rate; Actuators; Etching; Fluids; Micropumps; Silicon; Valves; microfluidic; micropump; piezoelectric; valveless and nozzle-diffuser;
fLanguage
English
Publisher
ieee
Conference_Titel
System Engineering and Technology (ICSET), 2012 International Conference on
Conference_Location
Bandung
Print_ISBN
978-1-4673-2375-8
Type
conf
DOI
10.1109/ICSEngT.2012.6339327
Filename
6339327
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